Title :
Ultra-sensitive, low-power and flexible H2S sensors based on palladium nanoparticle-coated metal oxide nanowires
Author :
Kim, D. ; Lim, M.A. ; Yang, D. ; Li, Z. ; Park, C.O. ; Park, I.
Author_Institution :
Dept. of Mech. Eng., KAIST, Daejeon, South Korea
Abstract :
We present flexible, ultra-sensitive and mechanically robust H2S gas sensors consisting of ZnO nanowires decorated with palladium (Pd) nanoparticles (NPs) supported by a polyimide substrate. ZnO nanowires were synthesized at desired location via hydrothermal method using local thermal energy generated by microheater array, which is integrated in a device. Also, the surface of ZnO nanowires was modified with Pd NPs by local wet chemical reaction for selective and sensitive detection of H2S gas. The H2S sensing of Pd NP-coated ZnO nanowire sensors was investigated under various measurements including the sensor response/recovery time, bias voltage effects of microheater array, and mechanical loading. The sensing performances of the flexible Pd NP-coated ZnO nanowire sensors were found to be extremely sensitive, reliable and robust for the detection of H2S gas.
Keywords :
II-VI semiconductors; gas sensors; hydrogen compounds; nanofabrication; nanoparticles; nanosensors; nanowires; palladium; sensor arrays; wide band gap semiconductors; zinc compounds; H2S; Pd-ZnO; flexible nanowire sensor; gas detection; hydrothermal method; local thermal energy; local wet chemical reaction; mechanical loading; mechanically robust gas sensor; microheater array; palladium nanoparticle-coated metal oxide nanowire sensor; polyimide substrate nanowire; recovery time; ultrasensitive low-power flexible gas sensor response; Gas detectors; Mechanical sensors; Nanowires; Sensor phenomena and characterization; Substrates; Zinc oxide;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170422
