Title :
High quality factor microdisk resonators for chip-scale visible sensing
Author :
Hosseini, Ehsan Shah ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
Ultra-high-quality (Q>4times106) microdisk resonators are demonstrated in a Si3N4 platform at 655 nm with straight and curved in-plane coupling waveguides on a Si substrate. Selective coupling to specific radial orders and polarizations is demonstrated with phase-matching. TM modes show higher sensitivity to environmental modifications for sensing.
Keywords :
integrated optics; micro-optics; microsensors; optical phase matching; optical resonators; optical sensors; optical waveguide components; silicon compounds; Si; Si3N4; TM modes; chip-scale visible sensing; curved in-plane coupling waveguide; environmental modification; high quality factor microdisk resonator; optical polarization; optical resonators; phase-matching; radial orders; straight in-plane coupling waveguide; wavelength 655 nm; Etching; Optical coupling; Optical frequency conversion; Optical materials; Optical refraction; Optical resonators; Optical sensors; Optical waveguides; Q factor; Silicon; (130.3120) Integrated optics devices; (230.5750) Resonators;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688630
