Title :
Subsurface microscopy of integrated circuits with apodization and polarization control
Author :
Koklu, F.H. ; Ippolito, S.B. ; Quesnel, J.I. ; Goldberg, B.B. ; Ünlü, M.S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Boston Univ., Boston, MA
Abstract :
We demonstrate a lateral spatial resolution of 160 nm (lambda0/8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.
Keywords :
OBIC; integrated circuit testing; optical microscopy; silicon; Si; apodization control; integrated circuits; one-photon excitation; polarization control; subsurface microscopy; Nails; Optical imaging; Optical interconnections; Optical microscopy; Optical polarization; Optical refraction; Optical scattering; Optical variables control; Silicon; Spatial resolution;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688631
