DocumentCode
1570391
Title
SOI pixel detector based on CMOS time-compression charge-injection
Author
Durini, Daniel ; Brockherde, Werner ; Hosticka, Bedrich J.
Author_Institution
Dept. Microelectron. Syst., Univ. Duisburg-Essen, Duisburg
fYear
2007
Firstpage
946
Lastpage
949
Abstract
Concept and experimental results obtained from a pixel detector based on CMOS time-compression charge- injection-devices (TC-CID) with a huge internal photocurrent amplification (-104), fabricated in CMOS silicon-on-insulator (SOI) technology are presented. Here, the readout circuitry is fabricated on highly-doped, 200 nm thick SOI film, while the photogate (PG) detector is fabricated on higher-resistivity handle wafer. The latter, together with the 30 V biasing possibilities enhances the quantum efficiency, especially for irradiations with wavelengths in the near-infra-red (NIR) part of the spectra.
Keywords
CMOS integrated circuits; charge injection; silicon-on-insulator; CMOS silicon-on-insulator; CMOS time-compression charge-injection-devices; SOI pixel detector; photocurrent amplification; photogate detector; size 200 nm; CMOS process; CMOS technology; Circuits; Detectors; Photoconductivity; Photodetectors; Silicon on insulator technology; Substrates; Thyristors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuit Theory and Design, 2007. ECCTD 2007. 18th European Conference on
Conference_Location
Seville
Print_ISBN
978-1-4244-1341-6
Electronic_ISBN
978-1-4244-1342-3
Type
conf
DOI
10.1109/ECCTD.2007.4529754
Filename
4529754
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