Title :
High-sensitivity photodetectors in CMOS technology for 3-D imaging
Author :
Betta, Gian-Franco Dalla ; Pancheri, Lucio ; Stoppa, David
Author_Institution :
DISI, Univ. of Trento, Trento
Abstract :
We report on avalanche photodiodes in different CMOS submicron technologies. Although their electro-optical characteristics are not optimized in some respects, these photodetectors are appealing for low-cost, high-performance fully integrated systems for high-sensitivity imaging applications.
Keywords :
CMOS image sensors; avalanche photodiodes; electro-optical devices; photodetectors; CMOS technology; avalanche photodiodes; high-sensitivity 3-D imaging; high-sensitivity photodetectors; single photon avalanche diodes; Avalanche photodiodes; CMOS process; CMOS technology; Detectors; Doping; Electric breakdown; Fabrication; Fluorescence; Photodetectors; Voltage;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688636
