DocumentCode
1570513
Title
Single-shot extreme ultraviolet microscopy with 54 nm resolution using a desktop-size capillary discharge laser
Author
Brizuela, F. ; Brewer, C. ; Martz, D. ; Marconi, M.C. ; Rocca, J.J. ; Menoni, C.S. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artyukov, I.A. ; Ponomareko, A.G. ; Kondratenko, V.V.
Author_Institution
NSF ERC for Extreme Ultraviolet Sci. & Technol. & Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
fYear
2008
Firstpage
362
Lastpage
363
Abstract
A compact full-field photon-based microscope based on a desktop-size 46.9 nm wavelength extreme ultraviolet laser that captures images with a single nanosecond laser pulse and with a measured spatial resolution of 54 nm is described.
Keywords
gas lasers; high-speed optical techniques; image resolution; ultraviolet spectroscopy; desktop-size capillary discharge laser; extreme ultraviolet laser; full-field photon-based microscope; measured spatial resolution; nanosecond laser pulse; single-shot extreme ultraviolet microscopy; wavelength 46.9 nm; wavelength 54 nm; Apertures; Gratings; Laser modes; Laser theory; Lighting; Optical imaging; Optical microscopy; Optical pulses; Spatial resolution; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location
Acapulco
Print_ISBN
978-1-4244-1931-9
Electronic_ISBN
978-1-4244-1932-6
Type
conf
DOI
10.1109/LEOS.2008.4688640
Filename
4688640
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