• DocumentCode
    1570931
  • Title

    Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications

  • Author

    Dayal, P. Babu ; Nakajima, J. ; Sakaguchi, T. ; Matsutani, A. ; Koyama, F.

  • Author_Institution
    Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
  • fYear
    2008
  • Firstpage
    400
  • Lastpage
    401
  • Abstract
    We propose a method of making multi-wavelength VCSEL arrays using surface nano-machining process. Preliminary results of 4-channel 980 nm VCSEL array with 5.4 nm wavelength spacing by multi-step wet etching of spacer layer are presented.
  • Keywords
    laser beam etching; laser beam machining; surface emitting lasers; wavelength division multiplexing; VCSEL; WDM; multi-step wet etching; surface nano-machining process; wavelength 5.4 nm; wavelength 980 nm; Dielectrics; Gratings; Laser tuning; Mirrors; Optical surface waves; Shape control; Vertical cavity surface emitting lasers; Wafer bonding; Wavelength division multiplexing; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
  • Conference_Location
    Acapulco
  • Print_ISBN
    978-1-4244-1931-9
  • Electronic_ISBN
    978-1-4244-1932-6
  • Type

    conf

  • DOI
    10.1109/LEOS.2008.4688659
  • Filename
    4688659
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1570931