Title :
Parameterized layout synthesis, extraction, and SPICE simulation for MEMS
Author :
Lo, Nanping R. ; Berg, Erik C. ; Quakkelaar, Scott R. ; Simon, Jonathan N. ; Tachiki, Mark ; Lee, Hee-Jung ; Pister, Kristofer S J
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A suite of software tools which implements parameterized layout synthesis and SPICE simulation for surface-micromachined micro-electrical-mechanical systems (MEMS) is presented. These tools and techniques are demonstrated by using the design of a MEMS linear resonator as an example, and the various stages of this design are examined, including the generation of the circuit layout from performance specifications, the simulation of the devices, and the testing of actual fabricated resonators
Keywords :
SPICE; circuit analysis computing; circuit layout CAD; digital simulation; micromechanical resonators; CAD tools; MEMS; SPICE simulation; circuit layout; linear resonator; micro-electrical-mechanical systems; parameterized layout synthesis; performance specifications; software tools; system-level design; Circuit simulation; Circuit testing; Design automation; Electrostatics; Micromechanical devices; Process design; SPICE; Software tools; Space exploration; Springs;
Conference_Titel :
Circuits and Systems, 1996. ISCAS '96., Connecting the World., 1996 IEEE International Symposium on
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-3073-0
DOI :
10.1109/ISCAS.1996.542005
