Title :
Design and performance of constant-temperature circuits for microbridge-sensor applications
Author :
Mastrangelo, C.H. ; Muller, R.S.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
The performance and transient behavior of constant-temperature microbridge bias circuits are analyzed and measured. This type of circuit enhances the microbridge gas-induced signals with respect to those induced by the substrate temperature. If is found that this type of circuit must be compensated to prevent excessive microbridge overheating. The elimination of temperature overshoot implies a reduction in the circuit bandwidth.<>
Keywords :
compensation; differential amplifiers; electric sensing devices; micromechanical devices; bandwidth reduction; constant-temperature circuits; design; differential amplifier; microbridge bias circuits; microbridge gas-induced signals; microbridge overheating; microbridge-sensor; performance; substrate temperature; temperature overshoot; transient behavior; Application software; Circuit analysis; Circuit testing; Laboratories; Performance analysis; Resistors; Temperature sensors; Thermal conductivity; Thermal resistance; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148914
