Title :
Fabrication processing of a trapezoidal main pole of single-pole-type heads
Author :
Okada, Takashi ; Kawato, Y. ; Haginoya, C. ; Nunokawa, I. ; Etoh, K. ; Fuyama, M.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Kanagawa, Japan
Abstract :
Summary form only given. The perpendicular recording system is considered as one of the most promising techniques to increase the areal density of hard disk drives. However, there is a side write/erase problem to adjacent tracks due to the skew angle of hard disk drives. A trapezoidal main pole of a single-pole-type head is required to improve this problem (S.E. Lambert and B.A. Lairson, PMRC 2000 digest 24aA-2, pp. 131-132, 2000). In this study, we investigated fabrication processing of the trapezoidal main pole.
Keywords :
chemical mechanical polishing; disc drives; electronic equipment manufacture; hard discs; magnetic heads; perpendicular magnetic recording; plasma materials processing; sputter etching; CMP; HDD skew angle; RIE; adjacent tracks; areal density; chemical mechanical polishing; damascene processing; hard disk drives; perpendicular recording system; reactive ion etching; side write/erase problem; single-pole-type heads; trapezoidal main pole fabrication processing; Chemical processes; Etching; Fabrication; Flowcharts; Hard disks; Laboratories; Magnetic heads; Perpendicular magnetic recording; Resists; Roentgenium;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001257
