Title :
Silicon nanomembranes: Opportunities for new Si functionalities via strain, flexibility, and layering
Author_Institution :
Univ. of Wisconsin, Madison, WI
Abstract :
The prospects for extending the use of Si to new functionalities by using nanomembranes are reviewed, with emphasis on optoelectronic and photonic applications.
Keywords :
elemental semiconductors; integrated optics; integrated optoelectronics; membranes; nanostructured materials; nanotechnology; silicon; Si; flexibility; layering; optoelectronic applications; photonic applications; silicon nanomembranes; strain; Biomembranes; Capacitive sensors; Etching; Germanium alloys; Germanium silicon alloys; Mechanical factors; Nanobioscience; Optoelectronic and photonic sensors; Shape; Silicon germanium;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688777
