• DocumentCode
    1573294
  • Title

    Silicon nanomembranes: Opportunities for new Si functionalities via strain, flexibility, and layering

  • Author

    Lagally, Max G.

  • Author_Institution
    Univ. of Wisconsin, Madison, WI
  • fYear
    2008
  • Firstpage
    632
  • Lastpage
    633
  • Abstract
    The prospects for extending the use of Si to new functionalities by using nanomembranes are reviewed, with emphasis on optoelectronic and photonic applications.
  • Keywords
    elemental semiconductors; integrated optics; integrated optoelectronics; membranes; nanostructured materials; nanotechnology; silicon; Si; flexibility; layering; optoelectronic applications; photonic applications; silicon nanomembranes; strain; Biomembranes; Capacitive sensors; Etching; Germanium alloys; Germanium silicon alloys; Mechanical factors; Nanobioscience; Optoelectronic and photonic sensors; Shape; Silicon germanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
  • Conference_Location
    Acapulco
  • Print_ISBN
    978-1-4244-1931-9
  • Electronic_ISBN
    978-1-4244-1932-6
  • Type

    conf

  • DOI
    10.1109/LEOS.2008.4688777
  • Filename
    4688777
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1573294