Title :
Truly three dimensional structures microfabricated by laser chemical processing
Author :
Westberg, H. ; Boman, M. ; Johansson, S. ; Schweitz, J.A.
Author_Institution :
Uppsala Univ., Sweden
Abstract :
A method for microfabrication of 3-D structures in free-space is presented. Laser-assisted chemical vapor deposition (LCVD) is used to grow a material at the point where the laser beam locally heats the substrate. This is done by moving a substrate perpendicularly relative to a laser beam by a micropositioning system, i.e. 3-D shapes can be created. The smallest structures that can be grown with this technique are about 1 mu m. Amorphous boron rods and crystalline boron springs have been manufactured as examples of micromechanical building units. The rods have a modulus of elasticity of 420-450 GPa, a fracture strain of 2.7-3.7%, and a fracture stress of 12-17 GPa. By development of the process more or less arbitrary details can be tailored for various applications.<>
Keywords :
boron; chemical vapour deposition; etching; laser beam applications; laser beam machining; micromechanical devices; semiconductor technology; amorphous B rods; chemical vapor deposition; crystalline B springs; free-space; laser chemical processing; microfabrication; micromechanical building units; micropositioning system; three dimensional structures; Amorphous materials; Boron; Chemical lasers; Chemical vapor deposition; Crystallization; Laser beams; Manufacturing; Optical materials; Shape; Springs;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148926
