Title :
Spatial resolution and feature size determination in extreme ultraviolet microscope images
Author :
Marconi, M.C. ; Wachulak, P.W. ; Brizuela, F. ; Brewer, C.A. ; Bartels, R. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
Abstract :
We have developed a numerical algorithm that, applied to extreme ultraviolet (EUV) micrographs, allows for the simultaneous determination of the spatial resolution and the size of the features of the image. The validity of the method was evaluated by analyzing EUV images.
Keywords :
feature extraction; image resolution; optical correlation; optical microscopy; correlation method; extreme ultraviolet micrographs; extreme ultraviolet microscope images; feature size; spatial resolution; Degradation; Gratings; Image analysis; Image resolution; Lighting; Optical filters; Scanning electron microscopy; Spatial resolution; Testing; Ultraviolet sources;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688877
