Title :
A thin film technology eddy current microsensor
Author :
Gatzen, H.H. ; Iswahjudi, H. ; Andreeva, E.
Author_Institution :
Inst. for Microtechnol., Hanover Univ., NH, USA
Abstract :
Summary form only given. Eddy current measurement for non-destructive testing excels due to its simplicity and reliability. While originally developed as an inspection technique for detecting large scale defects, there is a growing need to also identify micron scale cracks. This application necessitates smaller sensors with improved resolution and sensitivity. In this paper, the authors present an eddy current microsensor for the detection of surface microcracks in both ferrous and non-ferrous metals.
Keywords :
crack detection; eddy current testing; magnetic sensors; magnetic thin film devices; microcracks; microsensors; surface cracks; ferrous metals; inspection technique; micron scale cracks; nondestructive testing; nonferrous metals; surface microcracks; thin film technology eddy current microsensor; Coils; Current measurement; Eddy current testing; Eddy currents; Magnetic field measurement; Magnetic sensors; Microsensors; Nondestructive testing; Surface resistance; Transistors;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001435
