Thick film shielded-loop coil for high frequency near field measurements

Summary form only given. In this paper, we present a new miniature coil with a multi-layer shielded loop structure for high frequency magnetic field measurements. This coil has two shielding ground layers having 10 /spl mu/m thickness, and has allowed the measurement in a broad frequency range (100 MHz-10 GHz) with high accuracy. We also investigate how this coil restrains induced voltage due to electric field. At present, the best value of spatial resolution reached 230 /spl mu/m. To obtain better spatial resolution, we reduce the window area of the loop to 20 /spl mu/m/sup 2/ successfully.