Title :
Two axis magnetic camera based on AMR sensors
Author :
Ahamada, B. ; Alves, F. ; Barrue, R. ; Julie, G. ; Belier, B. ; Coutrot, A.-L. ; Martincic, E. ; Dufour-Gergam, E.
Author_Institution :
LESiR-ENSC, Cachan, France
Abstract :
Summary form only given. Integrated magnetic sensors are presented. The different technological steps are described. A two-axis magnetic camera has been designed, consisting in 3/spl times/3 assembled anisotropic MR Ni/sub 83/Fe/sub 17/ thin films. These films are deposited under magnetic field on 2 inches [100] silicon wafers. Each sensor combines four resistors connected in a Wheatstone bridge. Each resistor includes three MR tapes 0.05 /spl mu/m thick, 500 /spl mu/m long and 10 /spl mu/m wide. In order to obtain a linear response of the magnetic sensor, the so-called barber pole biasing technique is used. The obtained sensing range and sensitivity are respectively 2 kA/m and 3 /spl mu/V/A.m/sup -1/. The advantages of this magnetic camera rest in: (a) the integration of nine bidirectional detectors on 0.25 cm/sup 2/ area, (b) the measurement of the surface magnetic field in electrical sheets.
Keywords :
magnetic anisotropy; magnetic field measurement; magnetic sensors; 0.05 micron; 10 micron; 2 inch; 500 micron; AMR sensors; Ni/sub 83/Fe/sub 17/; Wheatstone bridge; anisotropic MR Ni/sub 83/Fe/sub 17/ thin films; anisotropy; barber pole biasing technique; electrical sheets; integrated magnetic sensors; magnetic sensor; sensing range; sensitivity; surface magnetic field measurement; two axis magnetic camera; vector magnetic cartography; Anisotropic magnetoresistance; Assembly; Cameras; Iron; Magnetic anisotropy; Magnetic field measurement; Magnetic films; Magnetic sensors; Perpendicular magnetic anisotropy; Resistors;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001440
