Title :
Tikhonov-Miller regularization with a denoisy and deconvolved signal as model of solution for improvement of depth resolution in SIMS analysis
Author :
Boulakroune, M´hamed ; Benatia, Djamel ; Slougui, Nabila ; Oualkadi, Ahmed El
Author_Institution :
Electr. Eng. Dept., Univ. Catholique de Louvain, Louvain-la-Neuve
Abstract :
In this paper the improvement by deconvolution of the depth resolution in Secondary Ion Masse Spectrometry (SIMS) analysis is studied. Indeed, a new Tikhonov-Miller deconvolution method, where a priori model of solution is included. The latter is a denoisy and pre-deconvolved signal obtained firstly by the application of wavelet shrinkage algorithm and after, by the introduction of the obtained denoisy signal in an iterative deconvolution algorithm. The results of the proposed algorithm are compared to those of Tikhonov-Miller regularization where the model of solution is a raw signal. Finally, based on the obtained results the advantages and limitations of the proposed method as well as suggestions for future work are presented and discussed.
Keywords :
deconvolution; iterative methods; secondary ion mass spectra; signal denoising; wavelet transforms; SIMS analysis; Tikhonov-Miller regularization; deconvolved signal; denoisy signal; depth resolution; iterative deconvolution algorithm; secondary ion masse spectrometry analysis; wavelet shrinkage algorithm; Data analysis; Deconvolution; Iterative algorithms; Laboratories; Mass spectroscopy; Noise reduction; Signal analysis; Signal resolution; Silicon; Telecommunications; SIMS; Tikhonov-Miller regularization; boron in silicon; depth resolution; wavelet shrinkage;
Conference_Titel :
Information and Communication Technologies: From Theory to Applications, 2008. ICTTA 2008. 3rd International Conference on
Conference_Location :
Damascus
Print_ISBN :
978-1-4244-1751-3
Electronic_ISBN :
978-1-4244-1752-0
DOI :
10.1109/ICTTA.2008.4530065
