Tikhonov-Miller regularization with a denoisy and deconvolved signal as model of solution for improvement of depth resolution in SIMS analysis

In this paper the improvement by deconvolution of the depth resolution in Secondary Ion Masse Spectrometry (SIMS) analysis is studied. Indeed, a new Tikhonov-Miller deconvolution method, where a priori model of solution is included. The latter is a denoisy and pre-deconvolved signal obtained firstly by the application of wavelet shrinkage algorithm and after, by the introduction of the obtained denoisy signal in an iterative deconvolution algorithm. The results of the proposed algorithm are compared to those of Tikhonov-Miller regularization where the model of solution is a raw signal. Finally, based on the obtained results the advantages and limitations of the proposed method as well as suggestions for future work are presented and discussed.