Title :
Error correction technique for dynamic impedance measurement
Author :
Quaresma, Henrique ; Silva, António Pedro ; Serra, António Cruz
Author_Institution :
Dept. of Electr. & Comput. Eng., Tech. Univ. of Lisbon, Lisboa, Portugal
Abstract :
In this paper a numerical model of a general purpose instrument to measure the electrical properties of semiconductor devices is presented. Numerical simulation results are compared with experimental data and it is shown that the model can accurately describe the equipment behavior. As a consequence it can be used to correct systematic errors increasing the accuracy of the instrument results.
Keywords :
electric impedance measurement; measurement systems; numerical analysis; dynamic impedance measurement; error correction technique; semiconductor devices; Calibration; Current measurement; Digital signal processing; Error correction; Gain measurement; Impedance measurement; Instruments; Numerical models; Testing; Voltage;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
Print_ISBN :
0-7803-7705-2
DOI :
10.1109/IMTC.2003.1207904
