Title :
Application Of Microelectronic Fabrication Techniques For The Development Of Biosensors
Author :
Liu, Chung-Chiun
Author_Institution :
Case Western Reserve University
Keywords :
Acoustic sensors; Biosensors; Chemical and biological sensors; Electrodes; Fabrication; Metallization; Microelectronics; Optical surface waves; Sensor phenomena and characterization; Sputtering;
Conference_Titel :
Engineering in Medicine and Biology Society, 1990., Proceedings of the Twelfth Annual International Conference of the IEEE
Print_ISBN :
0-87942-559-8
DOI :
10.1109/IEMBS.1990.692003
