FEM model of electrostatically actuated MEMS temperature sensor

Author

Atia, Ammar ; Ibrahim, Mohammad ; Abdul-Jabbar, Omer ; Hassan, Mehdi

Author_Institution

Fac. of Eng., Sudan Univ. of Sci. & Technol., Khartoum, Sudan

fYear

2013

Firstpage

341

Lastpage

344

Abstract

Micro electromechanical system (MEMS) is an emerging technology that gives high accuracy and high speed with least error due to the micro dimension. To design a simple but accurate MEMS sensors remains a challenge. Modeling of a MEMS temperature sensor, using simple microcantilever structure, is represented in this paper. The sensor is actuated electrostatically. The effect of temperature on the resonance was calculated ANSYS software. The device was made of copper (contact electrode), silicon (vibrating part) and silicon oxide (insulation layer). When the temperature varies the properties of the MEMS device also changes and hence the resonance frequency.

Keywords

cantilevers; copper; electrostatic actuators; elemental semiconductors; finite element analysis; microsensors; silicon; silicon compounds; temperature sensors; ANSYS software; Cu-Si-SiO; FEM model; copper contact electrode; electrostatically actuated MEMS temperature sensor; insulation silicon oxide layer; microcantilever structure; microelectromechanical system; resonance frequency; silicon layer; temperature effect; Finite element analysis; Micromechanical devices; Resonant frequency; Silicon; Temperature; Temperature measurement; Temperature sensors; FEM Model; actuated MEMS; electrostatical; temperature sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Computing, Electrical and Electronics Engineering (ICCEEE), 2013 International Conference on

Conference_Location

Khartoum

Print_ISBN

978-1-4673-6231-3

Type

conf

DOI

10.1109/ICCEEE.2013.6633959

Filename

6633959