Title :
Deposition of (Ti,Cr,Zr)N-MoS2 Thin Films by D.C. Magnetron Sputtering
Author :
Kim, Sun Kyu ; Pham Van Vinh
Author_Institution :
Sch. of Mater. Sci. & Eng., Ulsan Univ.
Abstract :
As technology advances, there is a demand for development of hard, solid lubricant coating. (Ti,Cr,Zr)N-MoS2 films were deposited on SKD11 tool steel substrate by co-deposition of MoS2 with (Ti,Cr,Zr)N using a D.C. magnetron sputtering process. The influence of the N2/Ar gas ratio, the amount of MoS2 in the films and the bias voltage on the mechanical and structural properties of the films were investigated.
Keywords :
chromium compounds; lubricants; molybdenum compounds; sputter deposition; steel; substrates; thin films; titanium compounds; zirconium compounds; D.C. magnetron sputtering; SKD11 tool; TiCrZrN-MoS2; mechanical properties; solid lubricant coating; steel substrate; structural properties; thin films deposition; Argon; Coatings; Lubricants; Materials science and technology; Mechanical factors; Solids; Sputtering; Steel; Substrates; Voltage; (Ti,Cr,Zr)N-MoS2 films; magnetron sputtering; solid lubricant coating;
Conference_Titel :
Strategic Technology, The 1st International Forum on
Conference_Location :
Ulsan
Print_ISBN :
1-4244-0426-6
Electronic_ISBN :
1-4244-0427-4
DOI :
10.1109/IFOST.2006.312229
