• DocumentCode
    1581000
  • Title

    Deposition of (Ti,Cr,Zr)N-MoS2 Thin Films by D.C. Magnetron Sputtering

  • Author

    Kim, Sun Kyu ; Pham Van Vinh

  • Author_Institution
    Sch. of Mater. Sci. & Eng., Ulsan Univ.
  • fYear
    2006
  • Firstpage
    190
  • Lastpage
    192
  • Abstract
    As technology advances, there is a demand for development of hard, solid lubricant coating. (Ti,Cr,Zr)N-MoS2 films were deposited on SKD11 tool steel substrate by co-deposition of MoS2 with (Ti,Cr,Zr)N using a D.C. magnetron sputtering process. The influence of the N2/Ar gas ratio, the amount of MoS2 in the films and the bias voltage on the mechanical and structural properties of the films were investigated.
  • Keywords
    chromium compounds; lubricants; molybdenum compounds; sputter deposition; steel; substrates; thin films; titanium compounds; zirconium compounds; D.C. magnetron sputtering; SKD11 tool; TiCrZrN-MoS2; mechanical properties; solid lubricant coating; steel substrate; structural properties; thin films deposition; Argon; Coatings; Lubricants; Materials science and technology; Mechanical factors; Solids; Sputtering; Steel; Substrates; Voltage; (Ti,Cr,Zr)N-MoS2 films; magnetron sputtering; solid lubricant coating;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Strategic Technology, The 1st International Forum on
  • Conference_Location
    Ulsan
  • Print_ISBN
    1-4244-0426-6
  • Electronic_ISBN
    1-4244-0427-4
  • Type

    conf

  • DOI
    10.1109/IFOST.2006.312229
  • Filename
    4107352
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1581000