Electromagnetic microactuators with multiple degrees of freedom

Author

Wagner, B. ; Kreutzer, M. ; Benecke, W.

Author_Institution

Fraunhofer Inst. fur Mikrostrukturtech., Berlin, Germany

fYear

1991

Firstpage

614

Lastpage

617

Abstract

Various types of actuators have been fabricated which make use of electromagnetic forces within micromachined silicon devices. A Nd-Fe-B permanent magnet is bonded to a movable silicon plate suspended by thin silicon beams. Planar coils are integrated monolithically on the chip to generate the driving magnetic field. Different actuators for torsional motion, with two degrees of freedom and with three degrees of freedom, are investigated theoretically and experimentally. Torsional angles up to 8 degrees and vertical displacements up to 40 mu m have been achieved.<>

Keywords

electric actuators; electromagnetic devices; integrated circuit technology; micromechanical devices; permanent magnets; semiconductor technology; small electric machines; 40 micron; Em microactuators; Nd-Fe-B permanent magnet; Si beam; Si plate; actuators; driving magnetic field; electromagnetic forces; micromachined Si devices; multiple degrees of freedom; planar coil; torsional motion; vertical displacements; Actuators; Coils; Electromagnetic forces; Magnetic levitation; Magnetic separation; Magnetization; Microactuators; Permanent magnets; Silicon; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148953

Filename

148953