Design and optimisation of electrostatic micromotors

This paper presents the techniques used to optimise the geometry of electrostatic micromotors for maximum average torque. The optimisation of the geometry is done under consideration that the excitation is also optimised for maximum average torque. The most important part of this optimisation is automation. Automation of the mesh generation for the finite element calculation, and of the equivalent circuit generation, are the parts that produce an optimisation-tool out of an otherwise fairly tedious technique.