Title :
Proceedings of International Electron Devices Meeting
Keywords :
CMOS integrated circuits; bipolar transistors; dielectric thin films; display instrumentation; electrostatic discharge; field effect transistors; hot carriers; image sensors; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; integrated circuit technology; integrated memory circuits; isolation technology; micromechanical devices; microwave devices; microwave tubes; optoelectronic devices; power integrated circuits; power semiconductor devices; quantum interference devices; semiconductor device reliability; semiconductor lasers; semiconductor process modelling; semiconductor technology; silicon-on-insulator; thin film transistors; vacuum microelectronics;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.497170