Title :
Oxide-field dependence of the NMOS hot-carrier degradation rate and its impact on AC-lifetime prediction
Author :
Kim, Seokwon A. ; Menberu, Beniyam ; Kopley, Thomas E. ; Chung, James E.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
This study presents a general relationship between the NMOS hot-carrier degradation rate n and the oxide-electric field at the drain Eox, which is valid over a wide range of stress-bias conditions and device parameters. Physical mechanisms for this oxide-field dependence are explored. It is also shown that failure to account for the oxide-field dependence of n and the inherent non-linearity of the degradation time dependence can result in significant overestimation of the predicted AC lifetime
Keywords :
MOSFET; hot carriers; semiconductor device reliability; AC-lifetime prediction; NMOS; degradation time dependence; device parameters; hot-carrier degradation rate; inherent nonlinearity; oxide-electric field; oxide-field dependence; physical mechanisms; stress-bias conditions; Computer science; Degradation; Hot carriers; Hydrogen; Laboratories; MOS devices; MOSFETs; Stress; Testing; Voltage;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.497177