Thin film transparent thermocouples

Transparent thin-film electrical conductors have been sputter-deposited to form transparent thermocouples. Indium tin oxide (ITO) and antimony tin oxide (ATO) have demonstrated Seebeck coefficients of 12-80 mu V/ degrees C depending on their conductivity and fabrication parameters. A direct relationship between resistivity and thermoelectric coefficient was indicated with films ranging from 0.001 to 0.1 Omega -cm and outputs of 12-80 mu V/ degrees C. In addition, thermoelectric measurements are reported on commercial ATO and ITO transparent films. It is noted that the control of fabrication parameters such as substrate temperature, sputtering atmosphere and rates, uniformity of deposition over substrate, and thermal treatments is important for controlling resistivity and thermoelectric output. Commercially available transparent electrically conductive films could be patterned to obtain transparent thermocouples and arrays.<>