Title :
Electron number density and collision frequency measurements in a microwave surface wave discharge
Author :
Motta, C.C. ; Fonseca, A.D. ; Gomes, G.H. ; Maciel, H.S.
Author_Institution :
Centro Tecnologico da Marinha em Sao Paulo, Brazil
Abstract :
The results of the electron number density and the electron-neutral collision frequency measurements in an argon plasma column produced by a microwave surface wave are reported in this paper. Two different measurement methods were used in order to determine the electron number density as a function of the plasma column axial position: the first uses a moving axial microwave probe mounted over the glass tube. The second uses a double Langmuir probe system. Two dispersion equations for the wave propagation were also obtained: one where the electron-neutral atoms collision frequency is much lower than the microwave frequency (v<\n\n\t\t
Keywords :
Bessel functions; Langmuir probes; argon; high-frequency discharges; plasma density; surface discharges; Ar; Ar plasma column; Hankel functions; Langmuir probe; axial microwave probe; collision frequency measurements; dispersion equations; electron number density; electron-neutral atoms collision frequency; electron-neutral collision frequency; electron-neutral collision frequency measurements; glass tube; microwave frequency; microwave surface wave discharge; modified Bessel functions; wave propagation; Argon; Electrons; Frequency measurement; Microwave frequencies; Plasma density; Plasma measurements; Plasma waves; Probes; Surface discharges; Surface waves;
Conference_Titel :
Pulsed Power Plasma Science, 2001. PPPS-2001. Digest of Technical Papers
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7120-8
DOI :
10.1109/PPPS.2001.1001789