• DocumentCode
    1584740
  • Title

    Low-cost deflection measurement for rapid characterization of microelectromechanical systems (mems)

  • Author

    Firebaugh, Samara L. ; Charles, Harry K., Jr. ; Edwards, Richard L. ; Keeney, Allen C. ; Wilderson, Samuel F.

  • Author_Institution
    United States Naval Academy
  • Volume
    1
  • fYear
    2003
  • Firstpage
    499
  • Lastpage
    502
  • Keywords
    Calibration; Displacement measurement; Microelectromechanical systems; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical sensors; Sensor systems; System testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-7705-2
  • Type

    conf

  • DOI
    10.1109/IMTC.2003.1208208
  • Filename
    1208208
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1584740