Title :
Low-cost deflection measurement for rapid characterization of microelectromechanical systems (mems)
Author :
Firebaugh, Samara L. ; Charles, Harry K., Jr. ; Edwards, Richard L. ; Keeney, Allen C. ; Wilderson, Samuel F.
Author_Institution :
United States Naval Academy
Keywords :
Calibration; Displacement measurement; Microelectromechanical systems; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical sensors; Sensor systems; System testing; Voltage;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
Print_ISBN :
0-7803-7705-2
DOI :
10.1109/IMTC.2003.1208208
