DocumentCode
1585155
Title
The heating component of RTP system
Author
Junjie, Yuan ; Guangping, He ; Jiying, Yin
Author_Institution
College of Mechanical Electronical and Engineering, North China University of Techonogy, No.5 Jinyuanzhuang Road, Shijingshan District, Beijing, China
fYear
2008
Firstpage
261
Lastpage
262
Abstract
The rapid thermal processing (RTP) system requires critical control of temperature uniformity. For most RTP system, the structure and heating modes of heating component determined the control strategy. Major types of the heating system of nowadays RTP systems were reviewed and compared. Then a heating system for RTP was proposed to improve the uniformity of heaving emission, which includes optimally designed light path and high efficient light reflecting system. The simulating results of that were also given.
Keywords
Control systems; Educational institutions; Heat engines; Heating; Helium; Rapid thermal processing; Temperature control; Thermal engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Thermal Processing of Semiconductors, 2008. RTP 2008. 16th IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
Print_ISBN
978-1-4244-1950-0
Electronic_ISBN
978-1-4244-1951-7
Type
conf
DOI
10.1109/RTP.2008.4690565
Filename
4690565
Link To Document