Research on a new decoupled dual-mass micro-gyroscope

A new decoupled dual-mass micro-gyroscope (DDMG) is described in this paper. The dual-mass in the micro-gyroscope can effectively reduce the common-mode interference caused by the linear acceleration. And the decoupled design in the micro-gyroscope can remove the cross-coupling between the drive-mode and the sense-mode. The working principle of the DDMG is researched and the dynamical formulas are derived. The measurement & controlling circuit is designed and achieved. The DDMG is processed and encapsulated in vacuum condition. According to the results of the sweep-frequency measure, the in-phase mode with same-frequency and the anti-phase mode with same-frequency simultaneously exist in the drive and sense modes. Finally, the prototype of the DDMG is achieved. The performance tests of the prototype show that the zero bias stability is 22.2°/h, the scale factor non-linearity is 26.5ppm, scale factor temperature coefficient is t190.7ppm/°C, zero bias temperature coefficient is 36.9°/h/°C, zero bias difference after shock test is 30.8°/h, zero bias difference after vibration test is 18°/h and the maximum rate is ±200°/s, which proves that the design of the DDMG is successful.