A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

The authors compare quartz and silicon as convenient materials for micromachined pressure sensors. They examine the properties of the resonators and the technological problems connected with the design of the resonator itself and of the mechanical chain allowing conversion of the external pressure to a stress applied to the resonator. Questions related to the sensor as a whole (packaging, interconnections) are discussed. It is concluded that silicon and quartz both appear to be good candidates for micromachined resonating pressure sensors. Neither has a major drawback that would make the other significantly better. The main differences are induced by design and technology. Thus, the choice of a material for a vibrating sensor will mostly depend on specifications other than the intrinsic properties of silicon or quartz.<>