Title :
Performance of integrated silicon infrared microspectrometers
Author :
Kong, S.-H. ; de Graaf, G. ; Rocha, L.A. ; Wolffenbuttel, R.F.
Author_Institution :
Delft University of Technology
Keywords :
Gratings; Infrared detectors; Optical arrays; Optical device fabrication; Optical devices; Optical refraction; Sensor arrays; Silicon; Spectroscopy; Wafer bonding;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
Print_ISBN :
0-7803-7705-2
DOI :
10.1109/IMTC.2003.1208248
