Title :
Novel touch mode capacitive pressure sensor based on SiC
Author :
Minghui, Li ; Jiahao, Deng ; Shiqiao, Gao
Author_Institution :
Sch. of Aerosp. Sci. & Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
The advantages of touch mode of operation are near linear output, large over-range pressure and robust structure. And Silicon Carbide (SiC) is a promising material for the device operating in harsh environments. In this paper, a novel touch mode pressure sensor based on SiC is presented, and the process is illustrated detailedly. Based on the calculation and Finite Element Analysis, the structure parameters of the sensor are designed detailedly.
Keywords :
capacitive sensors; finite element analysis; pressure sensors; silicon compounds; tactile sensors; SiC; finite element analysis; near linear output; over range pressure; robust structure; touch mode capacitive pressure sensor; Capacitance; Electrodes; Material properties; Sensitivity; Silicon carbide; Stress; Substrates; PECVD SiC; capacitive pressure sensor; touch mode;
Conference_Titel :
Electronic Measurement & Instruments (ICEMI), 2011 10th International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-8158-3
DOI :
10.1109/ICEMI.2011.6037743
