A polymer-based microfluidic mixing system driven by vortex micropumps

This paper describes a polymer-based microfluidic mixing system developed by integrating two vortex micropumps and a micromixer. Fluid transmission with steady flow rate is driven by the circumrotating motion of the impellers in the micropumps. The mixing principle is based on the ultrasonic wave generated by the PZT substrate oscillation. We will illustrate the designs, the fabrication processes and the operation theories of both devices. Experiments will be conducted to investigate the performance of the mixing system.