DocumentCode
1586957
Title
Diamond based atomic oxygen sensor for space applications
Author
Haenni, Werner H. ; Boving, Hans J. ; Perret, André M. ; Van Eesbeek, Marc ; Matcham, J.
Author_Institution
Centre Suisse d´´Electron. et de Microtech. SA, Neuchatel, Switzerland
fYear
1998
Firstpage
234
Lastpage
237
Abstract
Diamond is a combustible material like graphite and amorphous carbon. Amorphous carbon is currently used as an atomic oxygen sensor material for short space flight missions. Thin, boron doped diamond films, have been used to build sensor devices acting as Wheatstone bridge elements. These devices have been exposed to simulated atomic oxygen. The resistance of the exposed resistors increases linearly with exposure to atomic oxygen. No interruption of the diamond consumption due to “possible” inhibition layer formation has been observed. Such sensor devices are currently fabricated by standard diamond deposition and reactive ion patterning methods
Keywords
bridge instruments; chemical sensors; diamond; electric sensing devices; elemental semiconductors; space vehicle electronics; sputter etching; C; Wheatstone bridge elements; diamond; exposed resistors; inhibition layer formation; reactive ion patterning methods; sensor devices; space applications; Aerospace materials; Amorphous materials; Atomic layer deposition; Boron; Bridge circuits; Chemical elements; Diamond-like carbon; Organic materials; Space missions; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
High Temperature Electronics Conference, 1998. HITEC. 1998 Fourth International
Conference_Location
Albuquerque, NM
Print_ISBN
0-7803-4540-1
Type
conf
DOI
10.1109/HITEC.1998.676794
Filename
676794
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