DocumentCode

1587103

Title

Direct Write Micromachining Using High Repetition Rate UV Lasers

Author

Illy, E.K. ; Withford, Michael J. ; Brown, D.J.W. ; Piper, J.A.

Author_Institution

Macquarie University

fYear

1998

Firstpage

249

Lastpage

249

Keywords

Micromachining;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

conf

DOI

10.1109/CLEOE.1998.719338

Filename

719338