Research on amplitude calibration of high pulse current source for semiconductor device test system

Pulse Test Method is widely used in semiconductor devices testing. As pulse signal is mostly periodic transient narrow pulse (e.g. pulse duration of 300μs) with higher specification, common DMM and digital oscilloscope can hardly fulfill accurately measurement of pulse signals for its sampling rate and measurement accuracy limitations. This will directly affect failure analysis and quality control aspects of semiconductor devices. National Instrument´s PXI-4071 Flex DMM, Visual C + + 6.0 and self-developed test adapters was used to constitute test platform in this article. Setting trigger, data acquisition and analyzing of measurement results can be fulfilled by software. Accurately measurement of pulse currents´ amplitude of semiconductor device test system was realized.