• DocumentCode
    1587507
  • Title

    A design and fabrication of mems gyroscope using PZT thin films

  • Author

    Iga, Yuki ; Kanda, Kensuke ; Fujita, Takayuki ; Higuchi, Kohei ; Maenaka, Kazusuke

  • Author_Institution
    Maenaka Human-Sensing Fusion Project, JST, Himeji, Japan
  • fYear
    2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper, we describe about design and fabrication of a piezoelectric gyroscope with a trident tuning fork structure for MEMS processes. The PZT thin film on the silicon beam was used for driving source and detection. We obtained the PZT thin film with thickness of 3um by the sputtered. The report describes a design of the gyroscope and characteristics of the PZT thin film.
  • Keywords
    gyroscopes; microfabrication; microsensors; piezoelectric thin films; MEMS processes; PZT thin film; piezoelectric gyroscope; silicon beam; size 3 mum; Gyroscopes; Monitoring; Silicon; MEMS; PZT; gyroscope;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    World Automation Congress (WAC), 2010
  • Conference_Location
    Kobe
  • ISSN
    2154-4824
  • Print_ISBN
    978-1-4244-9673-0
  • Electronic_ISBN
    2154-4824
  • Type

    conf

  • Filename
    5665347
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1587507