Title :
Micro-diaphragm performance analysis for polyimide diaphragm
Author :
Hasikin, K. ; Soin, N. ; Ibrahim, F.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Malaya, Kuala Lumpur, Malaysia
Abstract :
This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.
Keywords :
diaphragms; optical sensors; pressure sensors; flexural rigidity; human pulse pressure detection; microdiaphragm performance analysis; optical sensor; polyimide diaphragm; resonance frequency; size 4 mum; size 90 mum; Biomedical engineering; Biosensors; Humans; Optical design; Optical sensors; Performance analysis; Polyimides; Pressure measurement; Resonance; Resonant frequency;
Conference_Titel :
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location :
Melaka
Print_ISBN :
978-1-4244-6608-5
DOI :
10.1109/SMELEC.2010.5549367
