Design of MEMS piezoelectric microgenerator using voltage and power optimization

This work presents a design methodology of the MEMS piezoelectric microgenerator based on optimizing the voltage and power. A pulse input force is applied on the z-axis, and the generated average voltage and power are recorded. Next, voltage and power optimization are carried out by varying the device parameters and selecting the optimized parameters. The Optimization results indicate that optimum voltage and power occur at 6.07 V and 108.3 μW when load resistance = 1.7 MΩ, damping = 100 Ns/m and thickness to area ratio = 3460 1/m.