Development of Metal Oxide Multilayer Reflectors for Water-Window Wavelengths by Atomic Layer Deposition

Author

Matsuyama, Hiroki ; Kumagai, Hayato ; Iimura, Y. ; Midorikawa, Katsumi ; Obara, M.

Author_Institution

RIKEN

fYear

1998

Firstpage

254

Lastpage

254

Keywords

Atomic layer deposition; Nonhomogeneous media;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

DOI

10.1109/CLEOE.1998.719347

Filename

719347

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