• DocumentCode
    1589883
  • Title

    Development of nanocrystalline laser ablated thick film array gas sensor

  • Author

    Abadi, M. H Shahrokh ; Hamidon, M.N. ; Shaari, Abdul Halim ; Abdullah, Norhafizah ; Wagiran, Rahman ; Misron, Norhisam

  • Author_Institution
    Electr. & Electron. Dept., Univ. Putra Malaysia, Serdang, Malaysia
  • fYear
    2010
  • Firstpage
    88
  • Lastpage
    91
  • Abstract
    A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.
  • Keywords
    gas sensors; nanofabrication; nanoparticles; platinum; pulsed laser deposition; sensor arrays; thick film sensors; tin compounds; Al2O3; PLAD technique; Pt; SnO2; alumina substrate; microstructural properties; morphological properties; nanocrystalline laser ablated gas sensor; pellet; platinum nanopowder; pulse laser ablation deposition; sensitive layer deposition; thick film array gas sensor; tin dioxide; wood smoke; Electrodes; Gas detectors; Gas insulation; Gas lasers; Optical arrays; Pulsed laser deposition; Sensor arrays; Thermal sensors; Thick film sensors; Thick films; Array gas sensor; Laser ablation; SnO2; Thick film;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
  • Conference_Location
    Melaka
  • Print_ISBN
    978-1-4244-6608-5
  • Type

    conf

  • DOI
    10.1109/SMELEC.2010.5549421
  • Filename
    5549421