DocumentCode
1589883
Title
Development of nanocrystalline laser ablated thick film array gas sensor
Author
Abadi, M. H Shahrokh ; Hamidon, M.N. ; Shaari, Abdul Halim ; Abdullah, Norhafizah ; Wagiran, Rahman ; Misron, Norhisam
Author_Institution
Electr. & Electron. Dept., Univ. Putra Malaysia, Serdang, Malaysia
fYear
2010
Firstpage
88
Lastpage
91
Abstract
A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.
Keywords
gas sensors; nanofabrication; nanoparticles; platinum; pulsed laser deposition; sensor arrays; thick film sensors; tin compounds; Al2O3; PLAD technique; Pt; SnO2; alumina substrate; microstructural properties; morphological properties; nanocrystalline laser ablated gas sensor; pellet; platinum nanopowder; pulse laser ablation deposition; sensitive layer deposition; thick film array gas sensor; tin dioxide; wood smoke; Electrodes; Gas detectors; Gas insulation; Gas lasers; Optical arrays; Pulsed laser deposition; Sensor arrays; Thermal sensors; Thick film sensors; Thick films; Array gas sensor; Laser ablation; SnO2; Thick film;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-6608-5
Type
conf
DOI
10.1109/SMELEC.2010.5549421
Filename
5549421
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