Microactuators for GaAs-based microwave integrated circuits

An approach to the realization of tunable/variable GaAs microwave integrated circuits (MMICs) using micromachined electrostatically controlled actuator technology is described. This technology is potentially compatible with conventional GaAs MMIC fabrication techniques, and will allow precise positioning and repositioning of metal conductors (tuning stubs, switches, capacitor plates, etc.) on an insulating substrate after fabrication is complete. This will allow the yield and performance of these GaAs circuits to be substantially improved. Microwave switches and tunable capacitors have been fabricated in order to demonstrate the principle of these devices, and they exhibit excellent RF performance. Voltages required to initiate movement are between 80 and 200 V. The design and performance aspects of these circuits are described.<>