Title :
Ultimate Precision in Micromachining Due to Extreme Energy Containment by Laser Pulses Down to 5 fs
Author :
Kautek, W. ; Kruger, Jorg ; Lenzner, Matthias ; Sartania, S. ; Spielmann, C. ; Krausz, F.
Author_Institution :
Federal Institute for Materials Research and Testing
Keywords :
Micromachining; Optical pulses;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719354
