Characterization of a low-pressure VHF-CCP for sterilization pros and cons of a polymer discharge chamber

Summary form only given. As Plasma is known to be very effective against bacteria, spores, fungi and macromolecules, a setup was developed to meet commercial needs. In order to keep sterilized goods sterile after plasma treatment, the discharge chamber can serve as sterile container. This required using a polymer discharge chamber. Since polymer and plasma interact, the plasma composition is strongly influenced by contaminated chamber walls. To study the effects and characterize the plasma, absolutely calibrated optical emission spectroscopy, Langmuir probe measurements, multipole resonance probe measurements and mass spectrometry were performed. The results were linked to biological experiments proving the effectiveness of the setup and improving understanding of sterilization and decontamination mechanisms. The experiments revealed some drawbacks due to plasma-wall interaction, but also possibilities to use the contamination for optimization of the sterilization process.