A miniaturized chemical analysis using two silicon micro pumps

A hybrid miniature chemical analysis system is realized using two piezoelectrically driven silicon micro-pumps and a separate glass flow through a cell with a potassium-sensitive ISFET. The measurement protocol is such that the sample solution does enter the detector but does not pass the sensitive pump valves, thus improving the practical applicability of the system. During its operation the sensor is continuously calibrated with a very low consumption of calibrating solution. With a measurement rate of 4 samples per minute the consumption of calibrant is only 2 ml/hour.<>