Title :
High tensile strain transfer into germanium microdisks using all-around strained SiN
Author :
Ghrib, A. ; El Kurdi, M. ; Prost, M. ; Sauvage, Sebastien ; Beaudoin, G. ; Largeau, Ludovic ; Chaigneau, Marc ; Ossikovski, Razvigor ; Sagnes, I. ; Boucaud, P.
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris Sud, Orsay, France
Abstract :
We demonstrate an optimized homogeneous tensile-strain transfer into germanium microdisks up to around 1.5% biaxial strain. This is achieved by combining a bonding technique and an all-around deposition of strained silicon nitride.
Keywords :
bonding processes; germanium; integrated optics; microcavity lasers; microdisc lasers; optical fabrication; optical materials; piezo-optical effects; semiconductor lasers; silicon compounds; Ge; SiN; all-around deposition; all-around strained SiN; biaxial strain; bonding technique; germanium microdisks; high tensile strain transfer; optimized homogeneous tensile-strain transfer; strained silicon nitride; Germanium; Optics; Photonics; Pump lasers; Silicon compounds; Tensile strain; Raman; Silicon photonics; germanium; integrated laser; microdisk cavity; photoluminescence; strain engineering;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6961938
