• DocumentCode
    159321
  • Title

    Low cost 300mm double-SOI substrate for low insertion loss 1D & 2D grating couplers

  • Author

    Baudot, C. ; Dutartre, D. ; Souhaite, A. ; Vulliet, Nathalie ; Jones, Andrew ; Ries, M. ; Mekis, A. ; Verslegers, L. ; Sun, P. ; Chi, Y. ; Cremer, Sebastien ; Gourhant, O. ; Benoit, Daniel ; Courgoulet, G. ; Perrot, C. ; Broussous, L. ; Pinguet, T. ; Sini

  • Author_Institution
    STMicroelectron., Crolles, France
  • fYear
    2014
  • fDate
    27-29 Aug. 2014
  • Firstpage
    137
  • Lastpage
    138
  • Abstract
    We report low insertion loss single polarization and polarization splitting grating couplers obtained on a 300mm silicon photonics platform through the fabrication of a low-cost Bragg reflector on a double SOI substrate.
  • Keywords
    diffraction gratings; integrated optics; optical couplers; optical fabrication; optical losses; silicon-on-insulator; 1D grating couplers; 2D grating couplers; Si; double-SOI substrate; low insertion loss; low-cost Bragg reflector fabrication; polarization splitting grating couplers; silicon photonics; single polarization grating couplers; size 300 mm; Couplers; Gratings; Insertion loss; Loss measurement; Optical losses; Reflectivity; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
  • Conference_Location
    Paris
  • Print_ISBN
    978-1-4799-2282-6
  • Type

    conf

  • DOI
    10.1109/Group4.2014.6961964
  • Filename
    6961964
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=159321