DocumentCode :
159321
Title :
Low cost 300mm double-SOI substrate for low insertion loss 1D & 2D grating couplers
Author :
Baudot, C. ; Dutartre, D. ; Souhaite, A. ; Vulliet, Nathalie ; Jones, Andrew ; Ries, M. ; Mekis, A. ; Verslegers, L. ; Sun, P. ; Chi, Y. ; Cremer, Sebastien ; Gourhant, O. ; Benoit, Daniel ; Courgoulet, G. ; Perrot, C. ; Broussous, L. ; Pinguet, T. ; Sini
Author_Institution :
STMicroelectron., Crolles, France
fYear :
2014
fDate :
27-29 Aug. 2014
Firstpage :
137
Lastpage :
138
Abstract :
We report low insertion loss single polarization and polarization splitting grating couplers obtained on a 300mm silicon photonics platform through the fabrication of a low-cost Bragg reflector on a double SOI substrate.
Keywords :
diffraction gratings; integrated optics; optical couplers; optical fabrication; optical losses; silicon-on-insulator; 1D grating couplers; 2D grating couplers; Si; double-SOI substrate; low insertion loss; low-cost Bragg reflector fabrication; polarization splitting grating couplers; silicon photonics; single polarization grating couplers; size 300 mm; Couplers; Gratings; Insertion loss; Loss measurement; Optical losses; Reflectivity; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
Type :
conf
DOI :
10.1109/Group4.2014.6961964
Filename :
6961964
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=159321
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