Title :
Fabrication tolerant silicon MZI filter
Author :
Dwivedi, Shipra ; D´heer, Herbert ; Bogaerts, W.
Author_Institution :
IMEC, Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
A compact fabrication tolerant MZI filter is demonstrated. The measured device shows a 20-fold improved tolerance to systematic waveguide linewidth variations, with a wavelength shift of less than 60 pm/nm linewidth change.
Keywords :
Mach-Zehnder interferometers; optical fabrication; optical waveguide filters; silicon; compact fabrication tolerant silicon MZI filter; improved tolerance; linewidth change; systematic waveguide linewidth variation; wavelength shift; Active filters; Fabrication; Optical waveguides; Sensitivity; Silicon; Waveguide transitions; Wavelength measurement;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6961969
