Microstructures formed on a low fluorescent glass using glassy carbon molding

We report a pattern generation method on glass using hot embossing technology. Microstructures were formed on Borofloat, a low fluorescent glass, using a glassy carbon mold. A cubic block in the size of 100 um times 100 um times 50 um is the basic testing pattern. This block was repeated on a mirror polished glassy carbon wafer with a space in the pitch of 30 um. The whole pattern area is in 15 mm times 15 mm square on this carbon mold. Both the glass wafer and the mold were heated to 655 degC and the embossing was processed at 2 MPa under vacuum (0.07 Pa). The state was held for 20 min, and then the embossed piece was cooled down to 200 degC naturally in the vacuum chamber. The patterns on mold were transferred compensate to the glass. Each fabrication cycle is about 1.5 hours. This method shows great potential to fabricate bio-MEMS devices efficiently with a very low cost. The main target is to fabricate the devices for highly sensitive fluorescent detection applications, which is very difficult to be realized using plastic substrates. A multi-channel pattern (with 70 um line and 400 urn space) has been generated on a 20 mm square glassy carbon using a laser machine. The pattern replicated on glass chips has been demonstrated